PART / 1CVD (Chemical Vapor Deposition) metoade: By 900-2300 ℃, mei TaCl5 en CnHm as tantaal en koalstof boarnen, H₂ as ferminderjende sfear, Ar₂as dragergas, reaksje deposition film. De taret coating is kompakt, unifoarm en hege suverens. D'r binne lykwols wat problemen ...
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