Yntroduksje fan waferdrager
PRODUCT CATAGORY
▶Wafer Carrier System foar PECVD & TALOX Process
• PECVD & TALOX Graphite Boat (M4~M12)
• Fertikale SM-boat (M4, M6)
• Implant & shower Graphite Part (M4~M6)
• C / C Tray & Ceramic Coating
• Metal RIE-Tray & Ceramic Coating
• Vacuum Sealing: O-Ring & SQ-Ring
▶Texturing & Wet Etching Transfer Process
• LSC H-Carrier of kassette (M4~M12)
• LSC V-Carrier of kassette (M4~M12)
• ASC Carrier of cassette (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• Transport Wheel (Roller) Series
▶Solar Cell Carrier & Metal Carrier
• TRC Carrier of cassette (M4~M12)
• Tydskrift (mei BELT)
GRAPHITE BOAT (H-Type)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Type)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Type)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Type)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & STORAGE BOX (~M12)
C/C TRAY of CARRIER (M4~M10)
C/C TRAY of CARRIER (M4~M10)
Fertikale BOAT (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Wafer Carrier System foar PECVD Process
▶ GRAPHITE BOAT (CT-Designed) M10 / M12 Proses
• SPECIAL DESIGN KONSEPT
▶ GRAPHITE BOAT (CT-Designed) M4 / M6 Process
▶ BOAT Accessory Parts
▶ VERTICAL BOAT-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ VERTICAL BOAT-161.7mm, 166mm WAFER
Solar Cell Carrier & Metal TRC Carrier
TYPE: Automatisearring
WAFER SIZE: ① 156 × 156 MM ② 156.75 × 156.75 MM
③161.7x161.7MM ④166x166MM
⑤ 180 × 180 mm ⑥ 210 × 210 mm
GEBRUK: Carry (Cassette)
KAPASITEIT: 100 blêden
PITCH: 4.76MM/5.953mm/6.35mm
DIMENSJE: sawat 559 × 220 × 220 MM
Likernôch 712 × 260 × 260 mm
Foardiel: Atmosfear
MATERIAAL: FLAME, SIDE BAR-Aluminium (anodisearjen)
SIDE PLATE-POM (antistatysk)
Cover of bottom bar-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (brûkersline)
TRC-METAL CARRIER (brûkersline)
TRC-METAL CARRIER (brûkersline)
DOUCHE PLATE & IMPLANT, CARRIER
